Accelerometer and method for making same

Details Accelerometer and method for making same Accelerometer and method for making same

G - Physics

01

P

G01P 15/02 (2006.01) G01P 15/08 (2006.01) G01P 15/12 (2006.01) G01P 15/13 (2006.01)

Patent

CA 2239106

An accelerometer based on single-crystal silicon and including a movable weight (1) connected to a stationary frame (3) via suspension arms (21, 22). The resulting sensor is formed in a stack of two silicon plates (6, 7) provided with abutment (43, 44, 47, 48) and counter-abutment (41, 42, 45, 46) functions for limiting the magnitude of the movements of the movable weight (1).

L'invention concerne un accéléromètre à base de silicium monocristallin comprenant une masse mobile (1) reliée à un cadre fixe (3) par des bras de suspension (21, 22). Ce capteur est réalisé dans l'empilement de deux plaques de silicium (6, 7), dans lesquelles sont réalisées des fonctions de butées (43, 44, 47, 48) et de contre-butées (41, 42, 45, 46) pour limiter l'ampleur des mouvements de la masse mobile (1).

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