Accelerometer with coplanar push-pull force transducers

Details Accelerometer with coplanar push-pull force transducers Accelerometer with coplanar push-pull force transducers

G - Physics

01

P

73/42

G01P 15/00 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 2010610

ACCELEROMETER WITH COPLANAR PUSH-PULL FORCE TRANSDUCERS Abstract of the Disclosure A push-pull accelerometer in which both force transducers (30, 32) lie in a common plane. Thus, when implemented in a silicon micromachined device, both transducers can be fabricated from a single crystal layer (34), thereby producing transducers with closely matched common mode responses.

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