Accelerometer with folded beams

Details Accelerometer with folded beams Accelerometer with folded beams

G - Physics

01

P

G01P 15/00 (2006.01) B81B 3/00 (2006.01) B81C 1/00 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01) G01V 1/18 (2006.01)

Patent

CA 2413965

An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilent folded beams (1415a- 1415d), wherein one or more electrode patterns are coupled to the spring mass assembly (1400), wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405).

L'invention concerne un accéléromètre comprenant une masse de mesure (1405) qui permet de déceler une accélération, mais aussi un boîtier à cavité, et un ou plusieurs ensembles masse à ressort (1400) dans la cavité, chaque ensemble masse à ressort (1400) comportant une structure support (1410), y compris un ou plusieurs faisceaux repliés (1415a-1415d) couplés à ladite structure (1410). La masse de mesure (1405) est couplée aux faisceaux (1415a-1415d), sachant qu'une ou plusieurs configurations d'électrode sont couplées à l'ensemble masse à ressort (1400). Une plaquette couvercle de position supérieure, comportant une électrode de condensateur de position supérieure, est couplée à la masse de mesure (1405), et une plaquette de couvercle de position inférieure, comportant une électrode de condensateur de position inférieure, est également couplée à la masse de mesure (1405).

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