F - Mech Eng,Light,Heat,Weapons – 04 – F
Patent
F - Mech Eng,Light,Heat,Weapons
04
F
88/104
F04F 5/46 (2006.01) E21B 21/00 (2006.01) G02B 17/08 (2006.01) G03F 7/20 (2006.01)
Patent
CA 1095760
ACHROMATIC UNIT MAGNIFICATION OPTICAL SYSTEM Abstract of the Disclosure A unit magnification optical system having micron resolution capability over a broad frequency spectrum. A spherical concave mirror is used to provide unit magnification at high numerical aperture with respect to object and image planes which are both located at or in the proximity of the center of curvature of the mirror, or the optical equivalent thereof. A first refractory element optically close to the object and image planes corrects longitudinal chromatic aberration of the principal rays while a second refractory element optically close to the mirror corrects residual longitudinal chromatic aberration of the marginal rays. In the preferred embodiment, a double prism arrangement located between the first refractory element and the center of curvature of the mirror optically reflects the object and image planes to parallel opposed positions having a common axis perpendicular to the axis of the mirror, The system may be used for either step-and-repeat or scanning exposure operations in fabricating microcircuits.
301709
Dill Frederick H.
Tibbetts Raymond E.
Wilczynski Janusz S.
International Business Machines Corporation
Kerr Alexander
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