Acoustic wave device physical parameter sensor

Details Acoustic wave device physical parameter sensor Acoustic wave device physical parameter sensor

G - Physics

01

D

G01D 5/56 (2006.01) G01D 5/12 (2006.01) G01L 9/12 (2006.01) G01N 27/04 (2006.01) G01N 27/414 (2006.01) G01R 33/02 (2006.01)

Patent

CA 2711968

An acoustic wave sensor employs an electromagnetic device (EMD) to transduce and amplify the response of an impedance element to a physical measurand. One embodiment uses a magnetic field sensor employing a microelectromechanical system (MEMS) capacitor to affect a change in the response of a SAW filter.

L'invention porte sur un détecteur d'onde acoustique qui utilise un dispositif électromagnétique (EMD) pour la transduction et l'amplification de la réponse d'un élément d'impédance à une grandeur physique mesurée. Un mode de réalisation utilise un détecteur de champ magnétique utilisant un condensateur de système microélectromécanique (MEMS) pour affecter un changement de la réponse d'un filtre SAW.

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