Acousto-optic tunable filter-based surface scanning system...

G - Physics – 01 – N

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G01N 21/17 (2006.01) G01B 11/06 (2006.01) G01N 21/31 (2006.01) G01N 21/35 (2006.01) G01N 21/64 (2006.01) G01N 21/88 (2006.01) G01N 21/94 (2006.01) G01J 3/12 (2006.01) G01N 21/21 (2006.01) G01N 21/59 (2006.01) G01N 21/84 (2006.01) G01N 21/93 (2006.01)

Patent

CA 2133307

2133307 9322655 PCTABScor01 A scanning system (10) for inspecting a surface (16) including a light source (30) which generates a beam of light (32) that is reflected, scattered or causes fluorescence at the surface to be inspected. An optical interface (14) receives the beam of light and directs it along a predetermined path extending to and from the surface. An acousto-optic tunable filter (34) tuned to pass light having a wavelength corresponding to a known optical property of a predetermined material is positioned within the path of light. A detector (42) is positioned to receive light emanating from the surface and is configured to monitor the intensity of light at each predetermined wavelength being monitored and generate a corrsponding signal. The system is preferably attached to a scan board (90) thereby enabling the system to be used in scanning a surface. The system also includes a signal processor (22) which processes the signal generated by the detector. The resulting data is displayed by an output device (26).

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