G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 26/08 (2006.01) B81B 3/00 (2006.01) G02B 26/10 (2006.01) G02B 27/00 (2006.01)
Patent
CA 2173637
A spatial light modulator of the DMD type having increased performance parameters. A pixel mirror is supported by a yoke whereby electrostatic attraction forces are generated between several structures. First, between the elevated mirror and an elevated address electrode. Second, between the yoke and an underlying address electrode. The pixel achieves high address torque, high latching torques, high reset forces, and greater address margins over previous generation devices. The proximity of the yoke over the substrate address electrodes realizes large attraction forces whereby the pixel is less susceptible to address upset, requires lower reset voltages and provides higher switching speeds.
Hornbeck Larry J.
Kirby Eades Gale Baker
Texas Instruments Incorporated
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