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G01F 1/42 (2006.01) G01B 13/00 (2006.01) G01B 13/12 (2006.01) G01D 5/42 (2006.01)
Patent
CA 2006962
A pneumatic bridge air gauge sensor. A measurement leg and a reference leg are used to measure a gap between a measurement probe and a surface. The two legs are initially balanced resulting in no air flow therebetween. A mass air flow sensor coupled between the two legs detects the mass air flow between the two legs resulting from a change in the gap distance from the balanced state.
Osler Hoskin & Harcourt Llp
Svg Lithography Systems Inc.
LandOfFree
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