4. H - Electricity
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Alignment mechanism

H - Electricity – 01 – L

Patent

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Details

356/192, 356/194

H01L 21/68 (2006.01) G03F 7/20 (2006.01)

Patent

CA 936627

Cachon Rene P.

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Grundon Forrest R.

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Masterson Frank H.

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Miller Joseph C.

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Wustrau Fred E.

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International Business Machines Corporation

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