Aluminum interconnection metallurgy system for silicon...

Details Aluminum interconnection metallurgy system for silicon... Aluminum interconnection metallurgy system for silicon...

H - Electricity

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H01L 23/522 (2006.01) C23F 1/02 (2006.01) H01L 21/00 (2006.01) H01L 21/285 (2006.01) H01L 23/485 (2006.01)

Patent

CA 996281

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