Aluminum metaphosphate source body for doping silicon

Details Aluminum metaphosphate source body for doping silicon Aluminum metaphosphate source body for doping silicon

C - Chemistry, Metallurgy

01

B

148/3, 23/64

C01B 25/36 (2006.01) C30B 31/00 (2006.01)

Patent

CA 1050234

ABSTRACT OF THE DISCLOSURE A solid source consisting essentially of high pur- ity aluminum metaphosphate, Al(PO3)3 is used for intro- ducing elemental phosphorous into "P"-type silicon chips or wafers of semi-conductor grade. The aluminum meta- phosphate fuctions as a source for the controlled release of P2O5 vapors which are directed to the desired face of the silicon wafer. The reverse side of the silicon wafer receives little or no phorphorous and consequently retains its character as "P"-type silicon.

201856

Affiliated with

Also associated with

Rating

Aluminum metaphosphate source body for doping silicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Aluminum metaphosphate source body for doping silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aluminum metaphosphate source body for doping silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-779286