Aluminum nitride sintered body formed with metallized layer...

C - Chemistry – Metallurgy – 04 – B

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C04B 41/88 (2006.01) C04B 41/51 (2006.01) H01L 21/48 (2006.01) H01L 23/15 (2006.01) H01L 23/498 (2006.01) H05K 1/09 (2006.01) H01L 33/00 (2006.01)

Patent

CA 1333241

An aluminum nitride sintered body is formed on its surface with a metallized layer, which contains tungsten, aluminum oxide and calcium oxide. Preferably, the metallized layer formed on the surface of the aluminum nitride sintered body contains 40 to 98 percent by weight of a metal, 1 to 25 percent by weight of an aluminum compound and 1 to 35 percent by weight of calcium oxide. In a method of forming a metallized layer on the surface of an aluminum nitride sintered body, an aluminum sintered body formed through previous firing is first prepared. Then, metal paste of tungsten containing powder of calcium oxide and powder of aluminum oxide is provided. The metal paste is coated on the surface of the aluminum nitride sintered body. The aluminum nitride sintered body coated with the metal paste is fired in an inert atmosphere.

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