Aluminum nitride sintered body with high thermal...

Details Aluminum nitride sintered body with high thermal... Aluminum nitride sintered body with high thermal...

C - Chemistry, Metallurgy

04

B

C04B 35/581 (2006.01) H01L 23/15 (2006.01) H01L 23/373 (2006.01)

Patent

CA 2171548

An aluminum nitride sintered product with a high thermal conductivity (at least 100 W/m.K) can be prepared at a sintering temperature of less than 1850 °C (often less than 1650 °C) using a sinterable combination of aluminum nitride powder with at least three sintering aids. The sintering aids include a source of a rare earth metal oxide, a source of an alkaline earth metal oxide, a boron source and, optionally, a source of aluminum oxide. The sinterable combinations may also be used to prepare cofired, multilayer substrates.

Produit fritté en nitrure d'aluminium à conductivité thermique élevée (au moins 100 W/m.K), préparé à une température de frittage inférieure à 1850 DEG C et souvent inférieure à 1650 DEG C, au moyen d'une combinaison frittable de poudre de nitrure d'aluminium et d'au moins trois adjuvants de frittage. Les adjuvants de frittage sont, entre autres, une source d'oxyde métallique des terres rares, une source d'oxyde métallique alcalino-terreux, une source de bore et éventuellement une source d'oxyde d'aluminium. Les combinaisons frittables peuvent également s'utiliser dans la préparation de substrats multicouches cocuits.

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