Ambient compensating interferometric apparatus

G - Physics – 01 – B

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33/45, 33/49

G01B 11/02 (2006.01) G01B 9/02 (2006.01)

Patent

CA 1147950

INTERFEROMETRIC APPARATUS ABSTRACT OF THE DISCLOSURE Apparatus for correcting the error of a position measuring apparatus, the apparatus having a first measuring interferometer path of variable length and a second interferometer monitoring path of fixed length. Means are provided for monitoring the change in the optical path length of the monitoring interferometer due to environmen- tal changes and for reflecting these changes in the indicated meas- urement of the measuring interferometer.

331310

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