An exposure device

Details An exposure device An exposure device

G - Physics

03

F

G03F 7/20 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2353858

An exposure device with a lamp, a condenser arrangement (2), a light modulator, a field lens and a projection objective (5), characterised in that the light modulator consists of a reflecting micro- mirror arrangement (3) in front of which the field lens (4) is arranged in a manner such that the beam path runs through the field lens (4) onto the micro-mirror arrangement (3) and after modulation and reflection at acute angles (16) once again runs through the field lens (4).

L'invention concerne un dispositif d'exposition doté d'une lampe, d'un dispositif condensateur (2), d'un modulateur de lumière, d'une lentille de champ et d'un objectif de projection (5). Ledit modulateur de lumière consiste en un dispositif à micro-miroir réfléchissant (3) en face duquel la lentille de champ (4) est prévue, de sorte que le trajet du faisceau traverse la lentille (4) et vienne sur le dispositif à micro-miroir (3) et après modulation et réflexion, retraverse à angles aigus (16) la lentille de champ (4).

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