G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 23/223 (2006.01)
Patent
CA 2623927
A method and computer program software product for establishing an areal density of an elemental constituent of one layer of a stack of layers of material overlying a substrate. Incident penetrating radiation excites characteristic x-ray fluorescent radiation in multiple lines associated with each of one or more elements. Areal densities of successive layers are determined by self-consistent solution of equations relating the ratios of intensities of the characteristic fluorescence lines of successive elements.
La présente invention concerne un procédé et un produit logiciel de programme d'ordinateur qui permettent d'établir la densité réelle d'un constituant élémentaire d'une couche faisant partie d'un empilement de couches de matière situé au-dessus d'un substrat. Un rayonnement pénétrant incident excite le rayonnement fluorescent des rayons x caractéristique dans plusieurs lignes associées à chacun des éléments. Les densités surfaciques des couches successives sont déterminées par la résolution autoconsistante d'équations relatives aux rapports des intensités des lignes de fluorescence caractéristique des éléments successifs.
Freedman & Associates
Thermo Niton Analyzers Llc
LandOfFree
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