Anamorphic scan lens for laser scanner

Details Anamorphic scan lens for laser scanner Anamorphic scan lens for laser scanner

G - Physics

02

B

G02B 26/12 (2006.01) G02B 27/00 (2006.01) G03F 7/20 (2006.01)

Patent

CA 2296595

An anamorphic, catadioptric scan lens simultaneously corrects for distortion, polygon mirror wobble, and flat-field telecentric scanning of polychromatic laser light that is injected sagittally onto the polygon mirror. This system is also capable of imaging multiple beams and is corrected for differential distortion. The scan lens is incorporated in a photolithographic image scanner.

On décrit un objectif de balayage catadioptrique anamorphoseur, qui corrige simultanément les déformations, l'oscillation du miroir polygonal, et le balayage télécentrique aplanéique de la lumière laser polychromatique projetée sagittalement sur le miroir polygonal. Le système peut également représenter en image de multiples faisceaux et corriger la déformation différentielle. Cet objectif de balayage s'incorpore dans un scanner d'images photolithographiques.

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