Angular velocity sensor and camera including the same

Details Angular velocity sensor and camera including the same Angular velocity sensor and camera including the same

G - Physics

01

P

G01P 3/22 (2006.01) G01C 19/56 (2006.01) G03B 19/02 (2006.01) G03B 19/18 (2006.01) H04N 5/232 (2006.01) H04N 5/217 (2006.01)

Patent

CA 2097272

In an angular velocity sensor, there are provided a flat substrate having a flat surface, a movable portion provided to a portion of the substrate and adapted to be vibrated in a direction perpendicular to the substrate surface, a first weight portion provided to one portion of the movable portion, second weight portion provided to another portion of the movable portion, first and second beam portions extending in first and second directions which are different from each other in the substrate surface and supporting the first and second weight portions, respectively. The movable portion is vibrated in the direction perpendicular to the substrate surface. Deformations of the first and second beam portions generated upon reception of Coriolis' forces when the substrate is rotated about the first and second directions as rotational axes are detected. Angular velocities of rotations about the first and second directions as the rotational axes are detected on the basis of the deformations of the first and second beam portions.

L'invention est un capteur de vitesse angulaire comportant un substrat plat ayant une surface plane, un élément mobile adjoint à une partie de ce substrat et adapté de façon à pouvoir vibrer dans la direction perpendiculaire à la surface du substrat, un premier poids fixé sur une partie de l'élément mobile, un second poids fixé à une autre partie de l'élément mobile, un premier et un second barreau montés dans des directions différentes sur la surface du substrat et servant chacun à supporter l'un des deux poids. On fait vibrer l'élément mobile dans la direction perpendiculaire à la surface du substrat. Les déformations des deux barreaux produites par les forces de Coriolis quand le substrat est en rotation, la première et la seconde direction étant les axes de rotation, sont détectées. Les vitesses angulaires autour de ces axes sont déterminées à partir des déformations du premier et du second barreau.

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