Anisotropic conductive sheet

H - Electricity – 01 – R

Patent

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Details

H01R 11/01 (2006.01) H01B 5/16 (2006.01)

Patent

CA 2557428

An anisotropic conductive sheet which does not damage a wafer nor the electrode terminals of a conduction measuring instrument due to loading when the wafer is to be inspected, and ensures a good conductivity. The anisotropic conductive sheet (1) comprises porous resin layers formed by foaming and electron-beam-crosslinking fluororubber or tetrafluoroethylene-propylene copolymer rubber having an open cell structure and provided on the inner walls of a plurality of through holes (3) pierced in the thickness direction of an electrically-insulating porous sheet (2) made of foamed fluororubber or the like, characterized in that the skeleton surface of the porous resin is coated with metal. In addition, it is especially preferable for porous resin.

Une feuille conductrice anisotropique qui n'endommage ni une pastille ni les bornes d'électrodes d'un instrument de mesure de conduction en raison de la charge quand la pastille doit être vérifiée et assure une bonne conductivité. La feuille conductrice anisotropique (1) comprend des couches de résine poreuse formé par moussage et par réticulation au rayon d'électron du caoutchouc fluoré ou du caoutchouc copolymère tétrafluoroéthylène-propylène ayant une structure de cellule ouverte et prévue sur les parois internes d'une pluralité de trous de passage (3) percés dans la direction de l'épaisseur d'une feuille poreuse électriquement isolante (2) fait de caoutchouc fluoré cellulaires caractérisé en ce que la surface de squelette de la résine poreuse est revêtue de métal. En supplément, il est préféré une résine poreuse.

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