Antireflection coating for a temperature sensitive substrate

Details Antireflection coating for a temperature sensitive substrate Antireflection coating for a temperature sensitive substrate

G - Physics

02

B

G02B 1/11 (2006.01) C23C 14/08 (2006.01) C23C 14/34 (2006.01)

Patent

CA 2204011

A multilayer antireflection coating (10) for a temperature sensitive substrate (15) such as plastic. One layer is a DC reactively sputtered metal oxide which may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate.

Revêtement antireflet (10) pour substrat thermosensible (15) tel que du plastique. L'une des couches est faite d'un oxyde métallique déposé par pulvérisation cathodique réactive par CC qui s'effectue rapidement et sans transmettre une importante quantité de chaleur au substrat. Une autre couche présente un indice de réfraction inférieur à celui du substrat.

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