Antireflection coatings and compounds useful therefor

Details Antireflection coatings and compounds useful therefor Antireflection coatings and compounds useful therefor

C - Chemistry, Metallurgy

09

B

96/203, 260/240.

C09B 57/00 (2006.01) G03C 1/40 (2006.01) G03F 7/09 (2006.01)

Patent

CA 1274516

ANTIREFLECTION COATINGS AND COMPOUNDS USEFUL THEREFOR Abstract There are disclosed antireflecting compounds and layers used in admixture with or adjacent to a positive-working, non-silver halide photosensitive layer. The compounds have the structural formula: Image wherein R1, R2, R3 and R4 are individually alkyl, thiazole, pyridine or a carbocyclic ring; or together R1 and R2 or R3 and R4 or R1 and R3 or R2 and R4 are the atoms to complete a heterocyclic ring; R5, R6 and R7 are individually H or alkyl; or together R5 and R6 comprise the atoms to complete a ring of from 5 to 6 carbon atoms; n is 0 or 1; and X is an anion. The resulting antireflecting layers have unexpected thermal resistances, needed for the thermal planarization usually given to such photoresists.

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