Antireflective photoresist composition

Details Antireflective photoresist composition Antireflective photoresist composition

G - Physics

03

C

96/150

G03C 1/40 (2006.01) G03F 7/031 (2006.01) G03F 7/09 (2006.01)

Patent

CA 1287768

ANTIREFLECTIVE PHOTORESIST COMPOSITION Abstract There is disclosed a photoresist composition in which a dye is added to absorb radiation reflected from the support on which the photoresist is coated. The dye is selected for resistance to volatilization, enhanced developer solubility, and for the wavelengths of absorption. Preferred examples are chalcones.

510293

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