Apparatus and crucible for vapor deposition

Details Apparatus and crucible for vapor deposition Apparatus and crucible for vapor deposition

B - Operations, Transporting

01

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B01L 3/04 (2006.01) B01J 19/02 (2006.01) C23C 14/24 (2006.01) C23C 14/52 (2006.01) C30B 23/02 (2006.01) C30B 30/08 (2006.01)

Patent

CA 2056816

ABSTRACT OF THE DISCLOSURE The apparatus comprises a thermally insulating enclosure, first, second, and third diffusers for constituting first, second, and third isothermalheating zones respectively around first, second, and third compartments of a removable closed crucible designed to contain a source material in the first compartment and a substrate in the second compartment. The first, second, and third diffusers arc thermally independent from one another by construction, each of them having a U-shaped section to surround the first, second, and third compartments of the crucible respectively The first, second, and third compartments are disposed in non- aligned manner along an angled line such that the angles between the first, second, and third compartments provide thermal decoupling of radiant energy between the compartments.

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