Apparatus and method for coating substrates

Details Apparatus and method for coating substrates Apparatus and method for coating substrates

C - Chemistry, Metallurgy

23

C

C23C 14/50 (2006.01) C23C 14/04 (2006.01) C23C 14/30 (2006.01) C23C 14/54 (2006.01)

Patent

CA 2354925

Apparatus (10) for treating a substrate, comprising: a vacuum chamber (12); a substrate carrier (14) adapted to carry a substrate (16) to be treated; a source material holder (22) for holding a source material (34) with which the substrate (16) is to be treated; and vaporising or sputtering means (20) for vaporising/sputtering the source material (34); wherein the source material holder (22) includes a positioning means (24) for relatively moving the source material (34) towards the substrate carrier (14).

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