C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 4/00 (2006.01) C23C 16/458 (2006.01) C23C 16/46 (2006.01) C23C 16/52 (2006.01) C30B 29/04 (2006.01)
Patent
CA 2177645
A method for depositing a substance on a surface of a substrate, comprises the steps of providing a cooling block having a surface that is cooled by heat exchange; supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap; providing a gas in said gap; and depositing said substance on the top surface of said substrate. Also disclosed is an apparatus for depositing a substance on a surface of a substrate, comprising a deposition chamber; a cooling block having a surface in said deposition chamber that is cooled by heat exchange; means for supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap; a gas in said gap; and means for depositing said substance on the top surface of said substrate.
Heuser Michael S.
Jaffe Stephen M.
Patten Donald O. Jr.
Quirk William A.
Simpson Matthew A.
Gowling Lafleur Henderson Llp
Saint-Gobain/norton Industrial Ceramics Corporation
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