C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 29/04 (2006.01) C23C 16/27 (2006.01) C23C 16/509 (2006.01) H01J 37/32 (2006.01)
Patent
CA 2176423
A method for depositing diamond film, comprising the steps of: providing an environment comprising hydrogen gas and a hydrocarbon gas; dissociating hydrogen gas of said environment by dielectric barrier discharge to obtain atomic hydrogen; and providing a deposition surface in said environment and implementing diamond deposition on said deposition surface from said hydrocarbon gas, assisted by said atomic hydrogen.
Méthode pour le dépôt d'une pellicule de diamant, comprenant les étapes suivantes : constituer un milieu renfermant de l'hydrogène et un hydrocarbure gazeux; dissocier l'hydrogène gazeux de ce milieu grâce à une barrière diélectrique, de façon à obtenir de l'hydrogène atomique; constituer une surface de dépôt dans ce milieu et déposer la pellicule de diamant sur la surface à partir de l'hydrocarbure gazeux avec l'aide de l'hydrogène atomique.
Heuser Michael S.
Jaffe Stephen M.
Shepard Cecil B.
Simpson Matthew
Gowling Lafleur Henderson Llp
Saint-Gobain/norton Industrial Ceramics Corporation
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