Apparatus and method for interferometric measurement

G - Physics – 01 – J

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G01J 9/02 (2006.01) G01J 3/26 (2006.01) G01J 3/45 (2006.01)

Patent

CA 2210412

A light source supplies light to an interferometer or polarimetric sensor and a beam divider divides the emerging light into two or more beam paths. Interference filters having different central wavelengths are provided in the beam paths and can be used to bring the two uncoupled interference signals into quadrature, e.g. by suitable adjustment of the tilting angle. In each beam path, a measuring device for quantitatively measuring the received light is disposed, and the data from the measuring devices are supplied to a data-processing device.

Une source lumineuse fournit de la lumière à un interféromètre, ou détecteur polarimétrique, puis un répartiteur de faisceaux divise la lumière émergeante en deux trajets de faisceaux ou plus. Des filtres interférentiels ayant des longueurs d'ondes centrales différentes sont fournis dans les trajets de faisceaux et peuvent être utilisés pour amener les deux signaux d'interférence non couplés à une quadrature, p. ex. par un rajustement adéquat de l'angle d'inclinaison. Dans chaque trajet de faisceaux, se trouve un appareil de mesure qui est utilisé pour mesurer la quantité de lumière reçue, puis les données recueillies sont fournies à un appareil de traitement de données.

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