G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 21/00 (2006.01) G01B 11/00 (2006.01) G01N 21/49 (2006.01) G01N 21/64 (2006.01) G01N 21/76 (2006.01) G01N 21/84 (2006.01) G02B 21/00 (2006.01)
Patent
CA 2345500
The present invention comprises an apparatus and a method of microscopy, for measuring depth dependent profiles of optical absorption, photoluminescence and light scattering in thin films on length scales of a few micrometers to a several millimeters. The principles of this invention are also directly extendable to imaging absorption and scattering at other wavelengths, and the scattering of electrons, and neutrons in thin films on the same or shorter length scales. In the optical range, this depth profile information is recovered by the direct recording of micrometer scale images of a light beam propagating along the depth axis of the material under study. The recording is implemented using a crossed beam microscope apparatus in which a collimated optical beam from a light source is propagated through the material under test. An image is recorded along a view axis, oriented at 90 degrees to the source beam axis, through a cross sectional image transfer surface of the sample, so prepared as to allow transmission of light emitted from the irradiated region of the sample. This emitted light is used to transfer an image to a camera of the source beam propagating though the sample, through a microscope or optical system aligned along the view axis. The depth profile recovered by such a microscope has a composite depth variation, which may be mathematically described by the product of a profile of light attenuation with depth of the source beam in the sample, multiplied by a matrix contrast arising from a depth variation in light emission efficiency of the sample. A modified two beam configuration of the microscope permits the extraction of the light attenuation profile of the source beam in the sample, independently of the matrix contrast.
Fu Shao-Wei
Power Joan F.
Ogilvy Renault Llp/s.e.n.c.r.l.,s.r.l.
University Mcgill
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