Apparatus and method for making multi-layer epitaxial growth...

Details Apparatus and method for making multi-layer epitaxial growth... Apparatus and method for making multi-layer epitaxial growth...

H - Electricity

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356/181

H01L 21/208 (2006.01) C30B 19/06 (2006.01) C30B 19/10 (2006.01)

Patent

CA 987795

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