Apparatus and method for obtaining surface profilometry and...

Details Apparatus and method for obtaining surface profilometry and... Apparatus and method for obtaining surface profilometry and...

G - Physics

01

B

88/96, 88/0.14

G01B 11/24 (2006.01) G01B 9/02 (2006.01) G01B 11/25 (2006.01)

Patent

CA 1261656

APPARATUS AND METHOD FOR OBTAINING SURFACE PROFILOMETRY AND THREE DIMENSIONAL SURFACE CONTOURS ABSTRACT Phase measurements of deformed grating images are used in performing improved optical profilometry. In one embodiment, phase differences between images of an object and a reference plane are used to obtain a measure of the object height. In another embodiment, line profiles are obtained at a series of rotational increments of a body. A full 360 degree surface profile, or a portion thereof, can then be generated.

490734

Affiliated with

Also associated with

Rating

Apparatus and method for obtaining surface profilometry and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for obtaining surface profilometry and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for obtaining surface profilometry and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1250026