G - Physics – 01 – N
Patent
G - Physics
01
N
356/1, 356/152
G01N 21/01 (2006.01) G01B 5/00 (2006.01) G01B 11/26 (2006.01) H01L 21/46 (2006.01)
Patent
CA 1040748
ABSTRACT OF THE DISCLOSURE A small portable device quickly secured to and re- moved from a body of monocrystalline material to be sawed and useful for aligning the body with respect to a saw blade, per- mitting sawing with precisely predetermined cyrstallographic orientation. The device has a viewing screen, a light source, and first and second autocollimators, the first directing a first collimated light beam toward a surface of the material. The resultant reverse reflection is directed back through the col- limating lens and a beam splitter images the reflection on the screen. The second autocollimator directs a second collimated light beam toward the saw blade surface, the resultant reflec- tion being directed back through its collimating lens and imaged on the screen as a second pattern having a position corresponding to the orientation of the blade with respect to the device. A method is also disclosed of aligning the body of monocrystalline material with respect to the saw blade for sawing, in which the body is mounted in a positionable sawing fixture, and an observation of the first pattern the orientation of the enclosure with respect to the predetermined crystallographic plane is made. The orientation of the plane of the saw blade with respect to the enclosure is then deter- minded by observation of the second pattern. The sawing fixture is then positioned to orient said crystallographic plane with respect to the saw blade plane on the basis of these determina- tions.
248359
Frederick Roger A.
Reichard Thomas E.
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