Apparatus and method for pumping in an ion optical device

Details Apparatus and method for pumping in an ion optical device Apparatus and method for pumping in an ion optical device

F - Mech Eng,Light,Heat,Weapons

04

D

F04D 19/04 (2006.01) H01J 49/26 (2006.01)

Patent

CA 2632251

An apparatus and method for differential pumping of a mass spectrometer or other ion-optical device provides a transverse pressure drop introduced across a face of a primary rotor of a turbomolecular pump by placement of one or more partitions in close proximity to the face of the primary rotor. Thus, two or more regions of space within the vacuum chamber having respective different pressures is achieved with a single pump.

Appareil et procédé de pompage différentiel d~un spectromètre de masse ou d~un autre dispositif optique à ions produisant une chute de pression transversale en travers d~une surface d~un rotor primaire d~une pompe turbomoléculaire en plaçant une ou plusieurs partitions à proximité immédiate de la surface du rotor primaire. Par conséquent, deux régions de l~espace à l~intérieur de la chambre sous vide ayant des pressions respectives différentes ou plus sont réalisées avec une seule pompe.

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