Apparatus and method for recovering photoresist developers...

B - Operations – Transporting – 01 – D

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B01D 29/66 (2006.01) B01D 29/25 (2006.01) B01D 37/00 (2006.01) B01D 61/18 (2006.01) B01D 65/02 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2332245

In recycling metal stripping solutions such as nitric acid-containing solutions, chemicals are drawn off from a stripping stage (100) into a separate circulatory path in which they are pumped through a series of tangential filters (60', 62', 64', 66'), and a collection tank (38'). Permeate from the filters is returned to the stripping stage (100), and solutions with high concentrations of solids are removed from the collection tank, allowing recovery of metals.

Lors du recyclage de solutions décapantes pour métaux telles que des solutions contenant de l'acide nitrique, on renvoie les substances chimiques depuis l'étage de décapage (100) vers une voie circulaire séparée, dans laquelle elles sont pompées à travers une série de filtres tangentiels (60', 62', 64', 66') et un réservoir de collecte (38'). Le perméat provenant des filtres est renvoyé à l'étage de décapage (100); les solutions avec des concentrations élevées de solides sont évacuées du réservoir de collecte, ce qui permet de récupérer les métaux.

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