G - Physics – 03 – B
Patent
G - Physics
03
B
88/104
G03B 41/00 (2006.01) G03F 7/20 (2006.01)
Patent
CA 1320374
MI-3789 ABSTRACT OF THE DISCLOSURE APPARATUS AND METHOD FOR REPRODUCING PATTERNS IN AN ANNULAR AREA USING RING FIELD PROJECTION OPTICS A master disk is positioned such that a radial portion thereof is within a restricted field having good imagery of an optical projection system. A second blank disk is positioned such that the image location extends along a radial portion thereof. As the two disks are rotated synchronously a pattern in an annular area is formed on the blank disk replicating the master. Good imagery of the pattern is obtained with a simple system having an image field less than the size of the object being reproduced.
598874
Buckley Jere D.
Galburt Daniel N.
Karatzas Charles
Sewell Harry
Zernike Frits
Buckley Jere D.
Galburt Daniel N.
Karatzas Charles
Osler Hoskin & Harcourt Llp
Perkin-Elmer Corporation The
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