Apparatus and method for supplying material to a substrate

B - Operations – Transporting – 05 – B

Patent

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Details

B05B 5/057 (2006.01) B05B 5/025 (2006.01) B05B 17/06 (2006.01) B41J 2/025 (2006.01) G03G 9/16 (2006.01) G03G 15/10 (2006.01)

Patent

CA 2226778

An apparatus and method are described for supplying material to a substrate (109). The apparatus includes a member (3) having a surface with a plurality of features (8) which locate, in use, menisci of a liquid (1) supplied to the member. An actuator (4) induces mechanical vibrations within the liquid located by the features to cause liquid droplets (7) to be sprayed. Liquid (1) is supplied to the member and electrical charge is supplied to the liquid by, for example, an electrode (14). Electrical charge or potential is also supplied to the substrate (109) so that the droplets are directed towards the substrate to deposit material thereon.

Appareil et procédé permettant d'apporter de la matière sur un sustrat (109). L'appareil comprend un élément (3) comportant une surface présentant une configuration particulière qui permet, lors du fonctionnement de l'appareil, la localisation des ménisques d'un liquide (1) fourni à l'élément. Un actionneur (4) produit des vibrations mécaniques dans le liquide situé sur la surface pour produire des gouttelettes (7) de liquide devant être pulvérisées. Le liquide (1) est fourni à l'élément et une charge électrique est fournie au liquide par une électrode (14) par exemple. La charge électrique ou le potentiel électrique est également fourni au substrat (109) de sorte que les gouttelettes soient dirigées vers le substrat pour déposer de la matière sur ce dernier.

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