B - Operations – Transporting – 05 – C
Patent
B - Operations, Transporting
05
C
B05C 11/08 (2006.01) B05C 5/00 (2006.01) B05C 9/06 (2006.01) B05C 15/00 (2006.01)
Patent
CA 2642480
The surface of a substrate (10) can be uniformly covered with a liquid if the substrate is fixed in a holding device (12a, 12b), which together with the surface of the substrate forms a process volume into which the liquid can be introduced onto the surface of the substrate by means of a wetting device (14, 50), and if the holding device with the substrate is set in a tumbling movement by means of a tumbling device (18a-18c), so that the liquid is uniformly distributed on the surface of the substrate.
Selon l'invention, la surface d'un support (10) peut être recouverte de manière uniforme par un liquide si le support est fixé dans un dispositif de maintien (12a, 12b) qui forme avec la surface du support un volume de traitement dans lequel le liquide peut être amené sur la surface du support au moyen d'un dispositif de mouillage (14, 50) et si le dispositif de maintien est déplacé avec le support en nutation au moyen d'un dispositif de nutation (18a-18c) de telle sorte que le liquide se répartisse uniformément sur la surface du support.
Stangl Hans-Juergen
Stangl Wolfgang
Mccarthy Tetrault Llp
Stangl Semiconductor Equipment Ag
Wuerth Solar Gmbh & Co. Kg
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