H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/00 (2006.01) B08B 1/02 (2006.01) B08B 1/04 (2006.01) B08B 3/04 (2006.01)
Patent
CA 2630885
The invention relates to a method and apparatus for wet-chemical processes (cleaning, etching, stripping, cutting, dehydration) in a continuous method for flat, thin and fracture-sensitive substrates, the substrate transport and the wet process being effected by media-absorbing rollers.
L'invention concerne un procédé et un dispositif destinés aux traitements chimiques par voie humide (nettoyage, gravure, décapage, revêtement, déshydrogénation) en continu pour des substrats plats, minces et fragiles, le transport des substrats et le traitement par voie humide s'effectuant au moyen de rouleaux absorbant les substances.
Kunze-Concewitz Horst
Acp-Advanced Clean Production Gmbh
Gowling Lafleur Henderson Llp
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