Apparatus and method of separating sample and substrate...

Details Apparatus and method of separating sample and substrate... Apparatus and method of separating sample and substrate...

H - Electricity

01

L

H01L 21/00 (2006.01)

Patent

CA 2240701

An apparatus for separating a substrate having a porous layer from t:he porous layer is provided. A bonded substrate stack having a porous layer is supported by substrate holders while being rotated. A jet nozzle ejects a high-speed, high-pressure liquid or water. The jet thrusts into the bonded substrate through a guide unit. The position in the x-axis direction of this guide unit is adjusted by a motor such that the jet is concentrated into the bonding interface of the bonded substrate stack.

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