Apparatus and methods for preparation of high-purity silicon...

Details Apparatus and methods for preparation of high-purity silicon... Apparatus and methods for preparation of high-purity silicon...

C - Chemistry, Metallurgy

30

B

C30B 29/06 (2006.01) C30B 25/18 (2006.01)

Patent

CA 2652493

Disclosed are a method and an apparatus for preparing a polycrystalline silicon rod using a mixed core means, comprising: installing a first core means made of a resistive material together with a second core means made of silicon material in an inner space of a deposition reactor; electrically heating the first core means and pre-heating the second core by the first core means which is electrically heated; electrically heating the preheated second core means; and supplying a reaction gas into the inner space in a state where the first core means and the second core means are electrically heated for silicon deposition.

Procédé et dispositif de fabrication d'une barre de silicium polycristallin au moyen d'éléments d'âme mixtes. Ce procédé englobe les opérations suivantes: mise en place d'un premier élément d'âme fait d'un matériau résistif conjointement avec un second élément d'âme en silicium dans l'espace intérieur d'un réacteur de déposition; chauffage par électricité du premier élément d'âme et préchauffage du second élément d'âme par le premier élément d'âme chauffé électriquement; et introduction d'un gaz de réaction dans l'espace intérieur de sorte que le premier et le second éléments d'âme sont chauffés en vue du dépôt du silicium.

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