G - Physics – 03 – B
Patent
G - Physics
03
B
356/192, 345/61,
G03B 41/00 (2006.01) G03F 7/20 (2006.01) G02F 1/1362 (2006.01)
Patent
CA 1292542
Abstract Apparatus for projecting multiple images from a pair of reticles (117) to a photo-sensitive coated substrate (1) to produce large scale electronic devices (2). A pair of parallel and proximate optical systems (29) are used, the optical systems being positioned to project in the z-direc- tion upon a movable stage (11) subject to controlled motion (159, 169) in the x- and y-directions. The apparatus in- cludes means (225) for determining the coordinates of motion of the stage relative to images projected from the reticles, means for using the determined positions to establish a stage transfer function for the apparatus relative to various positions of stage, and means (130) for applying the transfer function to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection, and for thereafter projecting an image upon the substrate. The stage is then stepped to a position to permit projection of an abutting image, and the transfer function is used to adjust the relative positions of the reticles (117) and sub- strate (1) for accurate image projection for projecting the abutting image upon the substrate (1). The steps are re- peated until sufficient images have been projected upon the substrate to make up one integrated layer of a flat panel display or other large scale electronic device. After treat- ing the photosensitive layer, subsequent layers are produced in a similar manner.
575889
Mceachern Robert A.
Resor Griffith L. III
Schneider William C.
Worth Walter H.
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