Apparatus and reactor for generating and feeding high purity...

B - Operations – Transporting – 01 – J

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

B01J 19/00 (2006.01) C01B 5/00 (2006.01) F22B 3/00 (2006.01) H01L 21/316 (2006.01)

Patent

CA 2479400

A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite- treated fins.

LandOfFree

Say what you really think

Search LandOfFree.com for Canadian inventors and patents. Rate them and share your experience with other people.

Rating

Apparatus and reactor for generating and feeding high purity... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and reactor for generating and feeding high purity..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and reactor for generating and feeding high purity... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFCA-PAI-O-1579457

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.