H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/179
H01L 21/285 (2006.01) C23C 14/00 (2006.01) C23C 14/08 (2006.01) H01L 31/18 (2006.01) H01L 31/20 (2006.01)
Patent
CA 1219968
ABSTRACT OF THE DISCLOSURE An improved method of and apparatus for depositing metallic oxide coatings that are highly electrically transmissive and highly electrically conductive onto a substrate. An r.f. signal is employed to develop an ionized plasma of metal and oxygen atoms, said plasma adapted for depositon onto a large area substrate which preferably includes semiconductor layers thereon. The method and apparatus of this invention are particularly adapted for the improved deposition of transmissive and conductive coatings which include low melting point metals onto the surface of plastic, glass or metallic substrates. The deposition may be accomplished in either a continuous or batch process mode.
442836
Energy Conversion Devices Inc.
Gowling Lafleur Henderson Llp
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