Apparatus for detecting registration marks on a target such...

Details Apparatus for detecting registration marks on a target such... Apparatus for detecting registration marks on a target such...

H - Electricity

01

L

356/188, 356/194

H01L 21/26 (2006.01) H01J 37/304 (2006.01) H01L 21/66 (2006.01)

Patent

CA 1085065

APPARATUS FOR DETECTING REGISTRATION MARKS ON A TARGET SUCH AS A SEMICONDUCTOR WAFER ABSTRACT OF THE DISCLOSURE A square shaped beam of charged particles is passed over a registration mark in the surface of a semiconductor wafer. Signals produced by pairs of diode detectors lo- cated with their surfaces orthogonal to the direction of the beam scan will peak when the beam passes over each of the edges of the registration mark. Each of the signals is differentiated; the differentiated signals are added together; and the resultant signal is filtered and ampli- fied to provide information regarding the position of the beam with respect to the wafer.

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