Apparatus for determining the position of a surface

Details Apparatus for determining the position of a surface Apparatus for determining the position of a surface

G - Physics

01

B

340/136

G01B 11/04 (2006.01) G01B 11/02 (2006.01) G01B 11/06 (2006.01)

Patent

CA 1046152

TITLE APPARATUS FOR DETERMINING THE POSITION OF A SURFACE INVENTORS ROY A. NODWELL STEVEN L. F. RICHARDS ABSTRACT OF THE DISCLOSURE This invention is directed to an electro-optical apparatus for determining the position of an opaque surface without contact with the surface. It includes a light beam system which projects a well defined beam having a rectan- gular cross-section, obliquely onto the surface such that any movement of the surface in the perpendicular direction will result in a displacement of the illuminated area on the surface, and a detector which converts this displacement into a proportional light intensity. The detector has a field stop with an aperture of specific shape onto which the illuminated area is imaged such that only a portion of the image will pass through the aperture depending on the displacement of the illuminated area. A photosensitive device is used to measure the light intensity passing through the aperture. Embodiments of apparatus for normalizing the output for greater precision are described as well as a system for measuring the thickness of an object by determining the position of two opposite surfaces of the object.

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