Apparatus for doping a semiconductor crystalline rod

Details Apparatus for doping a semiconductor crystalline rod Apparatus for doping a semiconductor crystalline rod

C - Chemistry, Metallurgy

30

B

148/2.8

C30B 1/00 (2006.01) C30B 31/20 (2006.01) G21K 1/00 (2006.01) G21K 5/08 (2006.01)

Patent

CA 1061686

ABSTRACT A device is described for the deliberate introduction of doping material radiogenically into a semiconductor crystalline rod, in which a connection to a radiation source is provided in an irradiation chamber with a rod holder arranged therein. The doping of the semiconductor rod is effected via controlled axial movements of the rod in relation to the radiation source.

233057

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