Apparatus for forming a thin film

Details Apparatus for forming a thin film Apparatus for forming a thin film

B - Operations, Transporting

01

J

204/109

B01J 19/08 (2006.01) C23C 14/00 (2006.01) C23C 14/22 (2006.01) C23C 16/50 (2006.01)

Patent

CA 1321976

ABSTRACT OF THE DISCLOSURES An apparatus for farming a thin film in which the reactive gases, which have been activated by the reactive gas activation means, accelerated by the kinetic energy controlling means, and still more activated by the excimer laser beam emitted toward the neighborhood of the substrate from the excimer laser beam emitting means disposed outside of the vacuum chamber, react with the material to be deposited, which has been clustered or turned into the cluster ion by the ICB device and accelerated, to form a thin film of a compound as the material to be deposited on the substrate disposed within the vacuum chamber maintained at a predetermined degree of vacuum.

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