H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/188
H01L 21/66 (2006.01) G01R 31/28 (2006.01)
Patent
CA 1203325
- 1 - Abstract: A carrier lifetime measuring apparatus has a first photon beam of a wavelength capable of rendering the optical absorption coefficient of a semiconductor sample small when the semiconductor sample having a potential barrier in the vicinity of its surface is irradiated with the radiation. Both such first photon beam and a second photon beam of a wavelength capable of rendering the optical absorption coefficient large, are respectively chopped and then employed to irradiate alternately an identical position on the semiconductor sample. First and second photovoltages are generated in the semiconductor sample by these photon beams, Such voltages are detected by capacitance coupling and the ratio between a first amplitude variation and a second amplitude variation is obtained from the amplitudes of these detected photo- voltages. These measurements enable evaluation of a minority carrier lifetime in the sample.
446381
Honma Noriaki
Munakata Chusuke
Hitachi Ltd.
Kirby Eades Gale Baker
LandOfFree
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