Apparatus for measuring impurities in ultrapure water

Details Apparatus for measuring impurities in ultrapure water Apparatus for measuring impurities in ultrapure water

G - Physics

01

N

324/45, 73/69

G01N 27/00 (2006.01) G01N 15/12 (2006.01)

Patent

CA 1218870

ABSTRACT A novel apparatus is provided for measuring the number of sizes of micro impurities such as fine dust or bacteria floating in ultrapure water. The apparatus is improved over the electrical pulse method for a high detection sensitivity and high precision and which does not operate erratically.

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