Apparatus for measuring the beam current of charged particle...

Details Apparatus for measuring the beam current of charged particle... Apparatus for measuring the beam current of charged particle...

H - Electricity

01

J

316/2, 324/58.1

H01J 9/42 (2006.01) G01R 19/00 (2006.01) G01T 1/29 (2006.01) H01J 37/00 (2006.01) H01J 37/244 (2006.01) H01J 37/317 (2006.01)

Patent

CA 1055104

APPARATUS FOR MEASURING THE BEAM CURRENT OF CHARGED PARTICLE BEAM Abstract of the Invention In an ion implantation apparatus, a structure for measuring the beam current at the target wherein a Faraday Cage is formed by walls adjacent to and electri- cally insulated from the target in combination with the target, means for biasing the target at a negative potential, means for biasing the walls at ground potential and means for measuring the target current and the wall current and for combining the two to provide an accurate beam current measurement.

264834

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