Apparatus for parallel detection of the behaviour of...

Details Apparatus for parallel detection of the behaviour of... Apparatus for parallel detection of the behaviour of...

G - Physics

01

N

G01N 19/00 (2006.01) B81B 7/02 (2006.01) G01H 9/00 (2006.01) G01N 5/02 (2006.01) G02B 21/00 (2006.01) G12B 21/08 (2006.01) G12B 21/20 (2006.01) G12B 21/02 (2006.01)

Patent

CA 2428218

The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample (21). The amplitude and the phase of resonance of micro-oscillators (12) are measured with optical means. The invention is characterised in that a source (1) is active during a fraction 1/n of the period (n being an integer) and of variable phase p/n of the period (p being an integer). Interferences are produced between light beams generated by reflection of incident light beams (7) and (8) on the micro-oscillators (12). Periodically the micro-oscillators (12) are displaced by means. The value of the parameter p (p being an integer) is varied and N elementary measurements are integrated to obtain a measurement representing each of the values of p. The phase and amplitude of each micro-oscillator (12) are calculated on the basis of the representative data obtained for each value of p and this for a large number of accumulations. The invention is applicable in the field of nanotechnologies.

L'invention concerne un appareil de détection en parallèle du comportement de microoscillateurs mécaniques interagissant avec l'échantillon (21). Par des moyens optiques, on mesure l'amplitude et la phase de résonance des microoscillateurs (12). Selon l'invention, une source (1) est active pendant une fraction 1/n de la période (n entier) et de phase variable p/n de la période (p entier). On réalise des interférences entre des faisceaux lumineux produits par réflexion de faisceaux lumineux incidents (7) et (8), sur les microoscillateurs (12). Des moyens déplacent périodiquement les microoscillateurs (12). On fait varier la valeur du paramètre p (p entier) et on intègre N mesures élémentaires pour obtenir une mesure représentative pour chacune des valeurs de p. On calcule la phase et l'amplitude de chaque microoscillateur (12) à partir des données représentatives obtenues pour chaque valeur de p et ceci pour un grand nombre d'accumulations. Cette invention est appliquée dans le domaine des nanotechnologies.

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